검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Intelligent process control of indium tin oxide sputter deposition using optical emission spectroscopy Eisgruber IL, Engel JR, Hollingsworth RE, Bhat PK, Wendt R Journal of Vacuum Science & Technology A, 17(1), 190, 1999 |
| No. | Article |
|---|---|
| 1 |
Intelligent process control of indium tin oxide sputter deposition using optical emission spectroscopy Eisgruber IL, Engel JR, Hollingsworth RE, Bhat PK, Wendt R Journal of Vacuum Science & Technology A, 17(1), 190, 1999 |