검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Investigation of SiO2 deposition processes with mass spectrometry and optical emission spectroscopy in plasma enhanced chemical vapor deposition using tetraethoxysilane Horii NM, Okimura K, Shibata A Thin Solid Films, 343-344, 148, 1999 |