검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Intrinsic gettering of copper in silicon wafers Isomae S, Ishida H, Itoga T, Hozawa K Journal of the Electrochemical Society, 149(6), G343, 2002 |
| No. | Article |
|---|---|
| 1 |
Intrinsic gettering of copper in silicon wafers Isomae S, Ishida H, Itoga T, Hozawa K Journal of the Electrochemical Society, 149(6), G343, 2002 |