화학공학소재연구정보센터
검색결과 : 13건
No. Article
1 Optimization of AC Electrochemical Etching for Fabricating Tungsten Nanotips with Controlled Tip Profile
Toh SL, Tan H, Lam JC, Hsia LC, Mai ZH
Journal of the Electrochemical Society, 157(1), E6, 2010
2 Loading Effect of Selective Epitaxial Growth of Silicon Germanium in Submicrometer-Scale Silicon (001) Windows
Liu JP, Chew HG, See A, Zhou MS, Hsia LC
Electrochemical and Solid State Letters, 12(3), H58, 2009
3 Sharpening Conical Tungsten Nanotips in KOH Solution under Laser Irradiation
Toh SL, Mai ZH, Hendarto E, Mak HJ, Lam JC, Hsia LC
Electrochemical and Solid State Letters, 12(8), D61, 2009
4 Metal desorption from copper(II)/nickel(II)-spiked kaolin as a soil component using plant-derived saponin biosurfactant
Chen WJ, Hsia LC, Chen KKY
Process Biochemistry, 43(5), 488, 2008
5 Thermal stability of a reverse-graded SiGe buffer layer for growth of relaxed SiGe epitaxy
Wong LH, Liu JP, Wong CC, Ferraris C, White TJ, Chan L, Sohn DK, Hsia LC
Electrochemical and Solid State Letters, 9(4), G114, 2006
6 Wafer level microarcing model in 90 nm chemical-vapor deposition low-k via etch on 300 mm silicon-on-insulator substrate
Cong H, Low CH, Pradeep YR, Zhang X, Chandima P, Liu WP, Tan JB, Hsia LC
Journal of Vacuum Science & Technology A, 24(4), 1404, 2006
7 A novel thin buffer concept for epitaxial growth of relaxed SiGe layers with low threading dislocation density
Liu JP, Wong LH, Sohn DK, Hsia LC, Chan L, Wong CC, Osten HJ
Electrochemical and Solid State Letters, 8(2), G60, 2005
8 Comparative study of trimethyl silane and tetramethylcyclotetrasiloxane-based low-k films
Widodo J, Goh LN, Lu W, Mhaisalkar SG, Zeng KY, Hsia LC
Journal of the Electrochemical Society, 152(4), G246, 2005
9 Effects of CO2 and O-2 on the property of tetra methyl tetra cyclo siloxanes based low-k film
Widodo J, Lu W, Mhaisalkar SG, Sudijono JL, Hsia LC, Shen L, Zeng KY
Thin Solid Films, 472(1-2), 195, 2005
10 Effects of O-2 and He on the properties of the trimethyl silane based low-k films
Widodo J, Goh LN, Lu W, Mhaisalkar SG, Ong S, Sudijono JL, Hsia LC, Tan PY, Zeng KY
Journal of Vacuum Science & Technology B, 22(3), 1030, 2004