검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Plasma-induced surface segregation and oxidation in nickel-iron thin films Hsiao R, Mauri D Applied Surface Science, 157(3), 185, 2000 |
| 2 |
Anisotropic Etching of a Novalak-Based Polymer at Cryogenic Temperature Hsiao R, Yu K, Fan LS, Pandhumsopom T, Sanitini H, Macdonald SA, Robertson N Journal of the Electrochemical Society, 144(3), 1008, 1997 |
| 3 |
Tantalum Plasma-Etching with Minimum Effect on Underlying Nickel-Iron Thin-Film Hsiao R, Miller D, Lin T, Robertson N Thin Solid Films, 304(1-2), 381, 1997 |
| 4 |
Etching of Tantalum in Fluorine-Containing High-Density Plasmas Hsiao R, Miller D Journal of the Electrochemical Society, 143(10), 3266, 1996 |
| 5 |
Response-Surface Study of Resist Etching in High-Density Oxygen Plasma and Interactions of O-2 Plasma with NiFe, Cu, Ta, and Al2O3 Hsiao R, Miller D, Kellock A Journal of Vacuum Science & Technology A, 14(3), 1028, 1996 |