검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Vacuum system of the 3 GeV Taiwan photon source Chen JR, Hsiung GY, Chang CC, Chen CL, Chan CK, Cheng CM, Yang CY, Wu LH, Hsueh HP Journal of Vacuum Science & Technology A, 28(4), 942, 2010 |
| 2 |
Ion energy distributions and optical emission spectra in NF3-based process chamber cleaning plasmas Hsueh HP, McGrath RT, Ji B, Felker BS, Langan JG, Karwacki EJ Journal of Vacuum Science & Technology B, 19(4), 1346, 2001 |