검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Dependence of the relative sensitivity factor of nitrogen on various oxynitride dielectric matrixes Zhu L, Teo HW, Huang YH, Ong K, Hua YN Thin Solid Films, 542, 134, 2013 |
| 2 |
Long-term reproducibility of relative sensitivity factors obtained with CAMECA Wf Gui D, Xing ZX, Huang YH, Mo ZQ, Hua YN, Zhao SP, Cha LZ Applied Surface Science, 255(4), 1427, 2008 |
| 3 |
Roughness development in the depth profiling with 500 eV O-2(+) beam with the combination of oxygen flooding and sample rotation Gui D, Xing ZX, Huang YH, Mo ZQ, Hua YN, Zhao SP, Cha LZ Applied Surface Science, 255(4), 1433, 2008 |
| 4 |
Depth profiling of ultra-thin oxynitride gate dielectrics by using MCs2+ technique Gui D, Mo ZQ, Xing ZX, Huang YH, Hua YN, Zhao SP, Cha LZ Applied Surface Science, 255(4), 1437, 2008 |