검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Deposition of silicon alloys in an integrated distributed electron cyclotron resonance reactor: Oxide, nitride, oxinitrides, and multilayer structures Bulkin P, Hofrichter A, Heitz T, Huc J, Drevillon B, Benattar JJ Journal of Vacuum Science & Technology A, 20(2), 338, 2002 |
| 2 |
Complete Mueller matrix measurement with a single high frequency modulation Compain E, Drevillon B, Huc J, Parey JY, Bouree JE Thin Solid Films, 313-314, 47, 1998 |
| 3 |
Dual-Plasma Reactor for Low-Temperature Deposition of Wide Band-Gap Silicon Alloys Etemadi R, Godet C, Perrin J, Drevillon B, Huc J, Parey JY, Rostaing JC, Coeuret F Journal of Vacuum Science & Technology A, 15(2), 320, 1997 |
| 4 |
Silicon-Based, Protective Transparent Multilayer Coatings Deposited at High-Rate on Optical Polymers by Dual-Mode MW/RF PECVD Rostaing JC, Coeuret F, Drevillon B, Etemadi R, Godet C, Huc J, Parey JY, Yakovlev VA Thin Solid Films, 236(1-2), 58, 1993 |