검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The influence of CH4 addition on composition, structure and optical characteristics of SiCN thin films deposited in a CH4/N-2/Ar/hexamethyldisilazane microwave plasma Bulou S, Le Brizoual L, Miska P, de Poucques L, Hugon R, Belmahi M, Bougdira J Thin Solid Films, 520(1), 245, 2011 |