검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Secondary ion mass spectrometry depth profiling of ultrashallow phosphorous in silicon Loesing R, Guryanov GM, Hunter JL, Griffis DP Journal of Vacuum Science & Technology B, 18(1), 509, 2000 |
| No. | Article |
|---|---|
| 1 |
Secondary ion mass spectrometry depth profiling of ultrashallow phosphorous in silicon Loesing R, Guryanov GM, Hunter JL, Griffis DP Journal of Vacuum Science & Technology B, 18(1), 509, 2000 |