검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
High-Rate CH4-H-2 Plasma Etch Processes for InP Whelan CS, Kazior TE, Hur KY Journal of Vacuum Science & Technology B, 15(5), 1728, 1997 |
| 2 |
Thermally Stable Auge-Au Ohmic Contacts for Single Doped InP High-Electron-Mobility Transistor Structures Mctaggart RA, Hur KY, Lemonias PJ, Hoke WE, Aucoin LM Journal of Vacuum Science & Technology B, 13(1), 163, 1995 |
| 3 |
Reactive Ion Etching of InP via Holes Hur KY, Guerin BJ, Kazior TE Journal of Vacuum Science & Technology B, 12(3), 1410, 1994 |
| 4 |
Electron-Beam Sublimation Deposited and Lifted-Off Carbon Mask for InP Reactive Ion Etching Hur KY, Mckenna TP, Kazior TE Journal of Vacuum Science & Technology B, 12(5), 3046, 1994 |