검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Cl-2-based inductively coupled plasma etching of NiFe and related materials Jung KB, Lambers ES, Childress JR, Pearton SJ, Jenson M, Hurst AT Journal of the Electrochemical Society, 145(11), 4025, 1998 |
| 2 |
Development of electron cyclotron resonance and inductively coupled plasma high density plasma etching for patterning of NiFe and NiFeCo Jung KB, Lambers ES, Childress JR, Pearton SJ, Jenson M, Hurst AT Journal of Vacuum Science & Technology A, 16(3), 1697, 1998 |