검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Stress in poly-SiC films grown by low pressure CVD Rodriguez-Viejo J, Hurtos E, Kressmann R, Clavaguera-Mora MT Materials Science Forum, 347-3, 477, 2000 |
| No. | Article |
|---|---|
| 1 |
Stress in poly-SiC films grown by low pressure CVD Rodriguez-Viejo J, Hurtos E, Kressmann R, Clavaguera-Mora MT Materials Science Forum, 347-3, 477, 2000 |