검색결과 : 2건
No. | Article |
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1 |
Simulation and characterization of a magnetic microdeflector for electron beam control in electron beam microcolumn system Rong R, Kim HS, Park SS, Hwang NW, Kim BJ, Ahn CH Journal of Vacuum Science & Technology B, 25(2), 373, 2007 |
2 |
Novel magnetic microstigmator for electron beam astigmatism correction in the electron beam microcolumn system Rong R, Kim HS, Park SS, Hwang NW, Park KW, Jin SW, Ahn CH Journal of Vacuum Science & Technology B, 25(6), 2020, 2007 |