검색결과 : 1건
No. | Article |
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1 |
Single step electron-beam lithography for asymmetric recess and gamma gate in high electron mobility transistor fabrication Lin CK, Wang WK, Hwu MJ, Chan YJ Journal of Vacuum Science & Technology B, 22(4), 1723, 2004 |
No. | Article |
---|---|
1 |
Single step electron-beam lithography for asymmetric recess and gamma gate in high electron mobility transistor fabrication Lin CK, Wang WK, Hwu MJ, Chan YJ Journal of Vacuum Science & Technology B, 22(4), 1723, 2004 |