화학공학소재연구정보센터
검색결과 : 25건
No. Article
1 A morphology study on the epitaxial growth of graphene and its buffer layer
Kruskopf M, Pierz K, Pakdehi DM, Wundrack S, Stosch R, Bakin A, Schumacher HW
Thin Solid Films, 659, 7, 2018
2 Effects and mechanisms of RIE on SiC inversion layer mobility and its recovery
Liu G, Xu Y, Xu C, Basile A, Wang F, Dhar S, Conrad E, Mooney P, Gustafsson T, Feldman LC
Applied Surface Science, 324, 30, 2015
3 Large scale, highly dense nanoholes on metal surfaces by underwater laser assisted hydrogen etching near nanocrystalline boundary
Lin D, Zhang MY, Ye C, Liu ZK, Liu R, Cheng GJ
Applied Surface Science, 258(10), 4254, 2012
4 In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers
Chen JQ, Louis E, Harmsen R, Tsarfati T, Wormeester H, van Kampen M, van Schaik W, van de Kruijs R, Bijkerk F
Applied Surface Science, 258(1), 7, 2011
5 Hydrogen etching on the surface of GaN for producing patterned structures
Yeh YH, Chen KM, Wu YH, Hsu YC, Lee WI
Journal of Crystal Growth, 314(1), 9, 2011
6 Hydrogen etching of GaN and its application to produce free-standing GaN thick films
Yeh YH, Chen KM, Wu YH, Hsu YC, Yu TY, Lee WI
Journal of Crystal Growth, 333(1), 16, 2011
7 Hydrogen etching of Si3N4 layers with plasma assisted hot wire CVD
Kniffler N, Pflueger A, Schulz T, Sommer S, Schroeder B
Thin Solid Films, 519(14), 4582, 2011
8 Empty core screw dislocations formed on 6H-SiC(0001) during hydrogen etching
Grodzicki M, Mazur P, Zuber S, Urbanik G, Ciszewski A
Thin Solid Films, 516(21), 7530, 2008
9 Step structures produced by hydrogen etching of initially step-free (0001) 4H-SiC mesas
Powell JA, Neudeck PG, Trunek AJ, Abel PB
Materials Science Forum, 483, 753, 2005
10 Fabrication of highly aligned nano-hole/trench structures by atomic force microscopy tip-induced oxidation and atomic hydrogen cleaning
Kim JS, Kawabe M, Koguchi N
Journal of Crystal Growth, 262(1-4), 265, 2004