검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Physico-chemical, structural and physical properties of hydrogenated silicon oxinitride films elaborated by pulsed radiofrequency discharge Bedjaoui M, Despax B Thin Solid Films, 518(15), 4142, 2010 |
| No. | Article |
|---|---|
| 1 |
Physico-chemical, structural and physical properties of hydrogenated silicon oxinitride films elaborated by pulsed radiofrequency discharge Bedjaoui M, Despax B Thin Solid Films, 518(15), 4142, 2010 |