검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Influence of hydrogen dilution on the growth of nanocrystalline silicon carbide films by low-frequency inductively coupled plasma chemical vapor deposition Cheng Q, Xu S, Chai JW, Huang SY, Ren YP, Long JD, Rutkevych PP, Ostrikov K Thin Solid Films, 516(18), 5991, 2008 |
| 2 |
Structural and electrical studies on fluorinated amorphous carbon films as intermetal dielectric layer in ULSI devices Ko HJ, Lee KM, Lee HJ, Choi CK Thin Solid Films, 506, 82, 2006 |