검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of silicon oxynitride thin films by x-ray photoelectron spectroscopy Shallenberger JR, Cole DA, Novak SW Journal of Vacuum Science & Technology A, 17(4), 1086, 1999 |
| 2 |
Thermal Oxynitridation of Silicon in N2O Ambients Kim K, Lee YH, Suh MS, Youn CJ, Lee KB, Lee HJ Journal of the Electrochemical Society, 143(10), 3372, 1996 |