검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Development of vertical compact ion implanter for gemstones applications Intarasiri S, Wijaikhum A, Bootkul D, Suwannakachorn D, Tippawan U, Yu LD, Singkarat S Applied Surface Science, 310, 94, 2014 |
| 2 |
Nanostructuring with a high current isotope separator and ion implanter Chini TK, Datta D, Bhattacharyya SR, Sanyal MK Applied Surface Science, 182(3-4), 313, 2001 |
| 3 |
Current Capabilities and Limitations of in-Situ Particle Monitors in Silicon Processing Equipment Takahashi KM, Daugherty JE Journal of Vacuum Science & Technology A, 14(6), 2983, 1996 |