검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Comparison of ordered structure in buried oxide layers in high-dose, low-dose, and internal-thermal-oxidation separation-by-implanted-oxygen wafers Shimura T, Fukuda K, Yasutake K, Hosoi T, Umeno M Thin Solid Films, 476(1), 125, 2005 |
| 2 |
SIMS study of oxygen in- and out-diffusion in SIMOX wafers during thermal annealing using O-18 implantation Hayashi S, Sasaki T, Kawamura K, Matsumura A, Yanagihara K, Tanaka K Applied Surface Science, 203, 504, 2003 |