검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Depth profile analysis of helium in silicon with high-resolution elastic recoil detection analysis Tomita M, Akutsu H, Oshima Y, Sato N, Mure S, Fukuyama H, Ichihara C Journal of Vacuum Science & Technology B, 28(3), 554, 2010 |
| 2 |
High-resolution Rutherford backscattering spectrometry study on process dependent elemental depth profile change of hafnium silicate on silicon Ichihara C, Yasuno S, Takeuchi H, Kobayashi A, Mure S, Fujikawa K, Sasakawa K Journal of Vacuum Science & Technology A, 27(4), 937, 2009 |