검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Atomic Layer Deposition and Characterization of Aluminum Silicate Thin Films for Optical Applications Hamalainen J, Ihanus J, Sajavaara T, Ritala M, Leskela M Journal of the Electrochemical Society, 158(2), P15, 2011 |
| 2 |
XPS and electroluminescence studies on SrS1-xSex and ZnS1-xSex thin films deposited by atomic layer deposition technique Ihanus J, Lambers E, Holloway PH, Ritala M, Leskela M Journal of Crystal Growth, 260(3-4), 440, 2004 |
| 3 |
Electroluminescent SrS and BaS thin films deposited by ALD using cyclopentadienyl precursors Ihanus J, Hanninen T, Hatanpaa T, Ritala M, Leskela M Journal of the Electrochemical Society, 151(10), H221, 2004 |
| 4 |
Properties of Ta2O3-Based Dielectric Nanolaminates Deposited by Atomic Layer Epitaxy Kukli K, Ihanus J, Ritala M, Leskela M Journal of the Electrochemical Society, 144(1), 300, 1997 |