화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Effective passivation of defects in Ge-rich SiGe-on-insulator substrates by Al2O3 deposition and subsequent post-annealing
Yang HG, Iyota M, Ikeura S, Wang D, Nakashima H
Solid-State Electronics, 60(1), 128, 2011
2 Defect control by Al deposition and the subsequent post-annealing for SiGe-on-insulator substrates with different Ge fractions
Yang HG, Wang D, Nakashima H, Hirayama K, Kojima S, Ikeura S
Thin Solid Films, 518(9), 2342, 2010