화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Influence of additives upon Cu thin film growth on atomic-layer-deposited Ru layer and trench-filling by direct electrodeposition
Im B, Kim S, Kim SH
Thin Solid Films, 636, 251, 2017
2 Surface Morphology Evolution of Cu Thin Films Electrodeposited Directly on Ti Diffusion Barrier in Citric Acid
Im B, Kim S
Journal of the Electrochemical Society, 162(10), D491, 2015
3 Nucleation and Growth of Cu Electrodeposited Directly on W Diffusion Barrier in Neutral Electrolyte
Im B, Kim S
Electrochimica Acta, 130, 52, 2014
4 Effect of bath additives on copper electrodeposited directly on diffusion barrier for integrated silicon devices
Im B, Kim S
Thin Solid Films, 546, 263, 2013
5 실험계획법을 활용한 은 나노 입자의 합성 및 최적화
임재홍, 강경연, 임바드로, 이재성
Korean Chemical Engineering Research, 46(4), 756, 2008