화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 On the mechanism of polytetrafluoroethylene ablation using a synchrotron radiation-induced photochemical process
Nagai H, Inayoshi M, Hori M, Goto T, Hiramatsu M
Applied Surface Science, 183(3-4), 284, 2001
2 Formation and micromachining of Teflon (fluorocarbon polymer) film by a completely dry process using synchrotron radiation
Inayoshi M, Ito M, Hori M, Goto T, Hiramatsu M
Journal of Vacuum Science & Technology B, 17(3), 949, 1999
3 Surface reaction of CF2 radicals for fluorocarbon film formation in SiO2/Si selective etching process
Inayoshi M, Ito M, Hori M, Goto T, Hiramatsu M
Journal of Vacuum Science & Technology A, 16(1), 233, 1998
4 Synchrotron radiation induced SiC formation on Si substrate employing methanol and H radical
Ikeda M, Inayoshi M, Hori M, Goto T, Hiramatsu M, Hiraya A
Journal of Vacuum Science & Technology A, 16(4), 2252, 1998
5 Formation of Polytetrafluoroethylene Thin-Films by Using CO2-Laser Evaporation and XeCl Laser-Ablation
Inayoshi M, Hori M, Goto T, Hiramatsu M, Nawata M, Hattori S
Journal of Vacuum Science & Technology A, 14(4), 1981, 1996
6 Crystal Orientation Control of YBa2Cu3Oy Thin-Films on MgO Prepared by Excimer-Laser Ablation with CO2-Laser Irradiation
Inayoshi M, Hiramatsu M, Sugiura Y, Kawamura H, Nawata M
Journal of Vacuum Science & Technology A, 13(2), 255, 1995