검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Resist Charging in Electron-Beam Lithography Liu W, Ingino J, Pease RF Journal of Vacuum Science & Technology B, 13(5), 1979, 1995 |
| 2 |
Workpiece Charging in Electron-Beam Lithography Ingino J, Owen G, Berglund CN, Browning R, Pease RF Journal of Vacuum Science & Technology B, 12(3), 1367, 1994 |