검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
One-Step Synthesis of Silicon Oxynitride Films Using a Steady-State and High-Flux Helicon-Wave Excited Nitrogen Plasma Huang TY, Jin CG, Yu J, Yang Y, Zhuge LJ, Wu XM, Sha ZD Plasma Chemistry and Plasma Processing, 37(4), 1237, 2017 |
| 2 |
Ionized plasma vapor deposition and filtered arc deposition; processes, properties and applications Martin PJ, Bendavid A, Takikawa H Journal of Vacuum Science & Technology A, 17(4), 2351, 1999 |