화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Study of radiolysis products in tracks over the distance from the ion trajectory in polyethylene terephthalate and polycarbonate
Vilensky AI, Vasil'ev AB, Larionov OG
Petroleum Chemistry, 56(10), 963, 2016
2 Ion trajectories and shadow effects in mesh-assisted plasma immersion ion implantation of insulator
Huang YX, Tian XB, Lv SX, Yang SQ, Fu RKY, Chu PK, Leng JS, Li Y
Applied Surface Science, 258(7), 2910, 2012
3 플라즈마 식각공정에서 발생하는 실리콘 게이트 전극의 Notching 현상
이원규
Journal of the Korean Industrial and Engineering Chemistry, 20(1), 99, 2009
4 Trajectories of Ions inside a Faraday Cage Located in a High Density Plasma Etcher
Ryu JH, Cho BO, Hwang SW, Moon SH, Kim CK
Korean Journal of Chemical Engineering, 20(2), 407, 2003