화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 Influence of substrate crystallography on the room temperature synthesis of AlN thin films by reactive sputtering
Iriarte GF, Reyes DF, Gonzalez D, Rodriguez JG, Garcia R, Calle F
Applied Surface Science, 257(22), 9306, 2011
2 Growth of nickel silicide (NiSix) nanowires by silane decomposition
Iriarte GF
Current Applied Physics, 11(1), 82, 2011
3 Influence of the magnetron on the growth of aluminum nitride thin films deposited by reactive sputtering
Iriarte GF
Journal of Vacuum Science & Technology A, 28(2), 193, 2010
4 Synthesis of c-axis oriented AlN thin films on different substrates: A review
Iriarte GF, Rodriguez JG, Calle F
Materials Research Bulletin, 45(9), 1039, 2010
5 Selective etching of AI/AIN structures for metallization of surface acoustic wave devices
Engelmark F, Iriarte GF, Katardjiev IV
Journal of Vacuum Science & Technology B, 20(3), 843, 2002
6 Structural and electroacoustic studies of AIN thin films during low temperature radio frequency sputter deposition
Engelmark F, Iriarte GF, Katardjiev IV, Ottosson M, Muralt P, Berg S
Journal of Vacuum Science & Technology A, 19(5), 2664, 2001