검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Low hydrogen content silicon nitride films deposited at room temperature with an ECR plasma source Isai GI, Holleman J, Wallinga H, Woerlee PH Journal of the Electrochemical Society, 151(10), C649, 2004 |
| 2 |
Conduction and trapping mechanisms in SiO2 films grown near room temperature by multipolar electron cyclotron resonance plasma enhanced chemical vapor deposition Isai GI, Holleman J, Wallinga H, Woerlee PH Journal of Vacuum Science & Technology B, 22(3), 1022, 2004 |