검색결과 : 1건
No. | Article |
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99.992% Si-28 CVD-grown epilayer on 300 mm substrates for large scale integration of silicon spin qubits Mazzocchi V, Sennikov PG, Bulanov AD, Churbanov MF, Bertrand B, Hutin L, Barnes JP, Drozdov MN, Hartmann JM, Sanquer M Journal of Crystal Growth, 509, 1, 2019 |