검색결과 : 14건
| No. | Article |
|---|---|
| 1 |
Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation Woszczyna M, Zawierucha P, Paletko P, Zielony M, Gotszalk T, Sarov Y, Ivanov T, Frank A, Zollner JP, Rangelow IW Journal of Vacuum Science & Technology B, 28(6), C6N12, 2010 |
| 2 |
Parallel proximal probe arrays with vertical interconnections Sarov Y, Frank A, Ivanov T, Zollner JP, Ivanova K, Volland B, Rangelow IW, Brogan A, Wilson R, Zawierucha P, Zielony M, Gotszalk T, Nikolov N, Zier M, Schmidt B, Kostic I Journal of Vacuum Science & Technology B, 27(6), 3132, 2009 |
| 3 |
Scanning proximal probes for parallel imaging and lithography Ivanova K, Sarov Y, Ivanov T, Frank A, Zollner J, Bitterlich C, Wenzel U, Volland BE, Klett S, Rangelow IW, Zawierucha P, Zielony M, Gotszalk T, Dontzov D, Schott W, Nikolov N, Zier M, Schmidt B, Engl W, Sulzbach T, Kostic I Journal of Vacuum Science & Technology B, 26(6), 2367, 2008 |
| 4 |
Micromachined piezoresistive proximal probe with integrated bimorph actuator for aligned single ion implantation Persaud A, Ivanova K, Sarov Y, Ivanov T, Volland BE, Rangelow IW, Nikolov N, Schenkel T, Djakov V, Jenkins DWK, Meijer J, Vogel T Journal of Vacuum Science & Technology B, 24(6), 3148, 2006 |
| 5 |
Ion implantation with scanning probe alignment Persaud A, Liddle JA, Schenkel T, Bokor J, Ivanov T, Rangelow IW Journal of Vacuum Science & Technology B, 23(6), 2798, 2005 |
| 6 |
Micromachined Arch-type cantilever as high sensitivity uncooled infrared detector Ivanova K, Ivanov T, Rangelow IW Journal of Vacuum Science & Technology B, 23(6), 3153, 2005 |
| 7 |
Single ion implantation with scanning probe alignment Persaud A, Allen FI, Giccluel F, Park SJ, Liddle JA, Schenkel T, Ivanov T, Ivanova K, Rangelow IW, Bokor J Journal of Vacuum Science & Technology B, 22(6), 2992, 2004 |
| 8 |
Influence of the rapid thermal annealing on the properties of thin a-Si films Nedev N, Beshkov G, Fortunato E, Georgiev SS, Ivanov T, Raniero L, Zhang SB, Martins R Materials Science Forum, 455-456, 108, 2004 |
| 9 |
Fabrication and properties of piezoresistive cantilever beam with porous silicon element Domanski K, Grabiec P, Marczewski J, Gotszalk T, Ivanov T, Abedinov N, Rangelow IW Journal of Vacuum Science & Technology B, 21(1), 48, 2003 |
| 10 |
Chemical recognition based on micromachined silicon cantilever array Abedinov N, Popov C, Yordanov Z, Ivanov T, Gotszalk T, Grabiec P, Kulisch W, Rangelow IW, Filenko D, Shirshov Y Journal of Vacuum Science & Technology B, 21(6), 2931, 2003 |