검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Influence of Patterning in Silicon Quantum-Well Structures on Photoluminescence Namatsu H, Furuta T, Nagase M, Kurihara K, Iwadate K, Murase K, Makino T Journal of Vacuum Science & Technology B, 14(4), 2500, 1996 |
| 2 |
Fabrication of Sub-10-nm Silicon Lines with Minimum Fluctuation Namatsu H, Nagase M, Kurihara K, Iwadate K, Furuta T, Murase K Journal of Vacuum Science & Technology B, 13(4), 1473, 1995 |
| 3 |
Si Nanostructures Fabricated by Electron-Beam Lithography Combined with Image Reversal Process Using Electron-Cyclotron-Resonance Plasma Oxidation Kurihara K, Iwadate K, Namatsu H, Nagase M, Murase K Journal of Vacuum Science & Technology B, 13(6), 2170, 1995 |