검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Evolution of hydrocarbon species on a silicon surface during methane plasma investigated by in-situ infrared spectroscopy Shinohara M, Katagiri T, Iwatsuji K, Shibata H, Matsuda Y, Fujiyama H Thin Solid Films, 506, 710, 2006 |
| 2 |
Oxidation of the hydrogen terminated silicon surfaces by oxygen plasma investigated by in-situ infrared spectroscopy Shinohara M, Katagiri T, Iwatsuji K, Matsuda Y, Fujiyama H, Kimura Y, Niwano M Thin Solid Films, 475(1-2), 128, 2005 |
| 3 |
Oxygen-plasma induced hydrogen desorption from hydrogen-terminated Si(100) and (111) surfaces investigated by infrared spectroscopy Shinohara M, Katagiri T, Iwatsuji K, Matsuda Y, Fujiyama H, Kimura Y, Niwano M Thin Solid Films, 464-65, 14, 2004 |
| 4 |
NOx gas sensing properties of tungsten oxide thin films synthesized by pulsed laser deposition method Kawasaki H, Namba J, Iwatsuji K, Suda Y, Wada K, Ebihara K, Ohshima T Applied Surface Science, 197, 547, 2002 |