검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Topography simulations for contact formation involving reactive ion etching, sputtering and chemical vapor deposition Takagi S, Onoue S, Iyanagi K, Nishitani K, Shinmura T Journal of Vacuum Science & Technology B, 23(3), 1076, 2005 |