화학공학소재연구정보센터
검색결과 : 11건
No. Article
1 Improvement of metal gate/high-k dielectric CMOSFETs characteristics by atomic layer etching of high-k gate dielectric
Min KS, Park C, Kang CY, Park CS, Park BJ, Kim YW, Lee BH, Lee JC, Bersuker G, Kirsch P, Jammy R, Yeom GY
Solid-State Electronics, 82, 82, 2013
2 Improvement of metal gate/high-k dielectric CMOSFETs characteristics by neutral beam etching of metal gate
Min KS, Park C, Kang CY, Park CS, Park BJ, Kim YW, Lee BH, Lee JC, Bersuker G, Kirsch P, Jammy R, Yeom GY
Solid-State Electronics, 86, 75, 2013
3 Highly scaled (L-g similar to 56 nm) gate-last Si tunnel field-effect transistors with I-ON > 100 mu A/mu m
Loh WY, Jeon K, Kang CY, Oh J, Liu TJK, Tseng HH, Xiong WD, Majhi P, Jammy R, Hu CM
Solid-State Electronics, 65-66, 22, 2011
4 Grain boundary-driven leakage path formation in HfO2 dielectrics
Bersuker G, Yum J, Vandelli L, Padovani A, Larcher L, Iglesias V, Porti M, Nafria M, McKenna K, Shluger A, Kirsch P, Jammy R
Solid-State Electronics, 65-66, 146, 2011
5 Comparison of Ohmic contact resistances of n- and p-type Ge source/drain and their impact on transport characteristics of Ge metal oxide semiconductor field effect transistors
Oh J, Huang J, Chen YT, Ok I, Jeon K, Lee SH, Sassman B, Loh WY, Lee HD, Ko DH, Majhi P, Kirsch P, Jammy R
Thin Solid Films, 520(1), 442, 2011
6 Impact of Oxygen on Work Function of Ru Oxide Metal Gate
Park CS, Bersuker G, Hung PY, Kirsch PD, Jammy R
Electrochemical and Solid State Letters, 13(4), H105, 2010
7 Modified NiSi/Si Schottky Barrier Height by Nitrogen Implantation
Kalra P, Vora N, Majhi P, Hung PY, Tseng HH, Jammy R, Liu TJK
Electrochemical and Solid State Letters, 12(1), H1, 2009
8 Ni Germanide Utilizing Ytterbium Interlayer for High-Performance Ge MOSFETs
Zhang YY, Oh J, Li SG, Jung SY, Park KY, Shin HS, Lee GW, Wang JS, Majhi P, Tseng HH, Jammy R, Bae TS, Lee HD
Electrochemical and Solid State Letters, 12(1), H18, 2009
9 Microstructural Innovation of Ni Germanide on Ge-on-Si Substrate by Using Palladium Incorporation
Zhang YY, Choi CJ, Oh J, Han IS, Li SG, Park KY, Shin HS, Lee GW, Wang JS, Majhi P, Jammy R, Lee HD
Electrochemical and Solid State Letters, 12(11), H402, 2009
10 Interface characteristics of ZrO2 high-k gate dielectrics on epitaxial Ge capacitor layers after thermal desorption of Ge native oxide and Ge nitridation
Oh J, Majhi P, Tseng HH, Jammy R, Kelly DQ, Banedee SK, Campbell JC
Thin Solid Films, 516(12), 4107, 2008