검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deposition of a Continuous and Conformal Copper Seed Layer by a Large-Area Electron Cyclotron Resonance Plasma Source with Embedded Lisitano Antenna Jang SO, You HJ, Kim YW, Jung YH, Hwang IU, Park JY, Lee H Plasma Chemistry and Plasma Processing, 34(1), 229, 2014 |