검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Hydrogen plasma pretreatment effect on the deposition of aluminum thin films from metalorganic chemical vapor deposition using dimethylethylamine alane Jang TW, Rhee HS, Ahn BT Journal of Vacuum Science & Technology A, 17(3), 1031, 1999 |
| 2 |
Effect of temperature and substrate on the growth behaviors of chemical vapor deposited Al films with dimethylethylamine alane source Jang TW, Moon W, Baek JT, Ahn BT Thin Solid Films, 333(1-2), 137, 1998 |