검색결과 : 4건
No. | Article |
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1 |
Damage and annealing recovery of boron-implanted ultra-shallow junction: The correlation between beam current and surface configuration Chang FM, Wu ZZ, Lin YF, Kao LC, Wu CT, JangJian SK, Chen YN, Lo KY Applied Surface Science, 433, 160, 2018 |
2 |
The influences of moisture and fluorine on the characteristics of fluorinated silicate glass for copper metallization Chang CC, JangJian SK, Chen JS Journal of the Electrochemical Society, 153(10), G901, 2006 |
3 |
Dependence of Cu/Ta-N/Ta metallization stability on the characteristics of low dielectric constant materials Chang CC, JangJian SK, Chen JS Journal of the Electrochemical Society, 152(7), G517, 2005 |
4 |
Thermal stability and bonding configuration of fluorine-modified low-k SiOC : H composite films JangJian SK, Liu CP, Wang YL, Hwang WS, Tseng WT Thin Solid Films, 469-470, 460, 2004 |