화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Damage and annealing recovery of boron-implanted ultra-shallow junction: The correlation between beam current and surface configuration
Chang FM, Wu ZZ, Lin YF, Kao LC, Wu CT, JangJian SK, Chen YN, Lo KY
Applied Surface Science, 433, 160, 2018
2 The influences of moisture and fluorine on the characteristics of fluorinated silicate glass for copper metallization
Chang CC, JangJian SK, Chen JS
Journal of the Electrochemical Society, 153(10), G901, 2006
3 Dependence of Cu/Ta-N/Ta metallization stability on the characteristics of low dielectric constant materials
Chang CC, JangJian SK, Chen JS
Journal of the Electrochemical Society, 152(7), G517, 2005
4 Thermal stability and bonding configuration of fluorine-modified low-k SiOC : H composite films
JangJian SK, Liu CP, Wang YL, Hwang WS, Tseng WT
Thin Solid Films, 469-470, 460, 2004