검색결과 : 1건
No. | Article |
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1 |
Spatial Distributions of Electron-Density and Temperature in Audio Frequency and Radio-Frequency Magnetron Glow-Discharges Fusselman SP, Yasuda HK, Javedani JB, Chiang J, Prelas MA Journal of Vacuum Science & Technology A, 12(6), 3115, 1994 |