검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Single- and double-hot arm asymmetrical polysilicon surface micromachined electrothermal microactuators applied to realize a microengine Kolesar ES, Ruff MD, Odom WE, Jayachadran JA, McAllister JB, Ko SY, Howard JT, Allen PB, Wilken JM, Boydston NC, Bosch JE, Wilks RJ Thin Solid Films, 420-421, 530, 2002 |