검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The impact of scaling on metal thickness for advanced back end of line interconnects Chen HC, Fan SC, Lin JH, Cheng YL, Jeng SP, Wu CM Thin Solid Films, 469-470, 487, 2004 |
| No. | Article |
|---|---|
| 1 |
The impact of scaling on metal thickness for advanced back end of line interconnects Chen HC, Fan SC, Lin JH, Cheng YL, Jeng SP, Wu CM Thin Solid Films, 469-470, 487, 2004 |