검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Nanoscale Lithography of Silicon Dioxide Using Electron-Beam Patterned Carboxylic-Acids as Localized Etch Initiators Whidden TK, Yang SJ, Jenkinsgray A, Pan M, Kozicki MN Journal of the Electrochemical Society, 144(2), 605, 1997 |
| 2 |
Nanoscale Scanning Tunneling Microscope Patterning of Silicon Dioxide Thin-Films by Catalyzed HF Vapor Etching Whidden TK, Allgair J, Jenkinsgray A, Kozicki MN Journal of Vacuum Science & Technology B, 13(3), 1337, 1995 |