검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Optimized nitridation of Al2O3 interlayers for atomic-layer-deposited HfO2 gate dielectric films Park HB, Cho M, Park J, Lee SW, Hwang CS, Jeongb J Electrochemical and Solid State Letters, 7(4), F25, 2004 |
| No. | Article |
|---|---|
| 1 |
Optimized nitridation of Al2O3 interlayers for atomic-layer-deposited HfO2 gate dielectric films Park HB, Cho M, Park J, Lee SW, Hwang CS, Jeongb J Electrochemical and Solid State Letters, 7(4), F25, 2004 |