검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Boron autodoping in single-wafer epitaxy of silicon at reduced pressure Jerier P, Dutartre D Journal of the Electrochemical Society, 146(1), 331, 1999 |
| No. | Article |
|---|---|
| 1 |
Boron autodoping in single-wafer epitaxy of silicon at reduced pressure Jerier P, Dutartre D Journal of the Electrochemical Society, 146(1), 331, 1999 |