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| No. | Article |
|---|---|
| 1 |
Deposition of polycrystalline 3C-SiC films on 100 mm diameter Si(100) wafers in a large-volume LPCVD furnace Zorman CA, Rajgopal S, Fu XA, Jezeski R, Melzak J, Mehregany M Electrochemical and Solid State Letters, 5(10), G99, 2002 |