검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Stability of Cu on epoxy siloxane polymer under bias temperature stress Wang PI, Juneja JS, Murarka SP, Lu TM, Jezewski C, Ghoshal R, Ghoshal R, Bakhru H Journal of the Electrochemical Society, 153(4), G358, 2006 |
| 2 |
Inductively coupled hydrogen plasma-assisted Cu ALD on metallic and dielectric surfaces Jezewski C, Lanford WA, Wiegand CJ, Singh JP, Wang PI, Senkevich JJ, Lu TM Journal of the Electrochemical Society, 152(2), C60, 2005 |
| 3 |
Atomic layer deposition of Pd on TaN for Cu electroless plating Kim Y, Ten Eyck GA, Ye DX, Jezewski C, Karabacak T, Shin HS, Senkevich JJ, Lu TM Journal of the Electrochemical Society, 152(6), C376, 2005 |
| 4 |
Low temperature chemical vapor deposition of Co thin films from Co-2(CO)(8) Ye DX, Pimanpang S, Jezewski C, Tang F, Senkevich JJ, Wang GC, Lu TM Thin Solid Films, 485(1-2), 95, 2005 |
| 5 |
Molecular caulking - A pore sealing CVD polymer for ultralow k dielectrics Jezewski C, Wiegand CJ, Ye DX, Mallikarjunan A, Liu DL, Jin CM, Lanford WA, Wang GC, Senkevich JJ, Lu TM Journal of the Electrochemical Society, 151(7), F157, 2004 |
| 6 |
Phosphorus atomic layers promoting the chemisorption of highly polarizable transition metallorganics Senkevich JJ, Yang GR, Lu TM, Cale TS, Jezewski C, Lanford WA Advanced Materials, 14(17), A189, 2002 |