검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Profile evolution simulation of oxide fencing during via-first dual damascene etching processes Jin WD, Sawin HH Journal of the Electrochemical Society, 150(11), G711, 2003 |
| 2 |
Feature profile evolution in high-density plasma etching of silicon with Cl-2 Jin WD, Sawin HH Journal of Vacuum Science & Technology A, 21(4), 911, 2003 |
| 3 |
Plasma-surface kinetics and simulation of feature profile evolution in Cl-2+HBr etching of polysilicon Jin WD, Vitale SA, Sawin HH Journal of Vacuum Science & Technology A, 20(6), 2106, 2002 |
| 4 |
Study of adsorption equilibrium and dynamics of benzene, toluene, and xylene on zeolite NaY Jin WD, Zhu SL Chemical Engineering & Technology, 23(2), 151, 2000 |