검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Investigation of pad staining and its effect on removal rate in copper chemical mechanical planarization Lee H, Zhuang Y, Borucki L, Joh S, O'Moore F, Philipossian A Thin Solid Films, 519(1), 259, 2010 |
| 2 |
Integrated multiscale three-dimensional simulation approach in local interconnect gap-fill optimization Sukharev V, Kumar K, Li WD, Zhao J, Pyka W, McInerney EJ, Joh S Journal of Vacuum Science & Technology B, 19(5), 1879, 2001 |
| 3 |
A Study of Thermophoretic Transport in a Reacting Flow with Application to External Chemical-Vapor-Deposition Processes Tsai HC, Greif R, Joh S International Journal of Heat and Mass Transfer, 38(10), 1901, 1995 |
| 4 |
The Effects of Sicl4 and GeCl4 Oxidation, Variable Properties, Buoyancy and Tube Rotation on the Modified Chemical-Vapor-Deposition Process Joh S, Greif R International Journal of Heat and Mass Transfer, 38(10), 1911, 1995 |